Scanning LiDAR system and method with unitary optical element

ABSTRACT

A LiDAR apparatus includes a first substrate, a laser diode on a surface of the substrate for outputting light, a fast axis collimator (FAC) lens receiving the light and generating an at least partially collimated light beam, a polarizing beam splitter optically coupled to the FAC lens, at least a portion of the light beam passing through the polarizing beam splitter to a region being observed by the LiDAR apparatus. An opaque coating on the back side of an aperture element coupled to the polarizing beam splitter is patterned to provide a transparent aperture. At least a portion of light returning to the LiDAR apparatus from the region being observed is directed by the polarizing beam splitter, through the transparent aperture in the opaque coating on the aperture element, through the at least partially reflective optical element to an optical detector mounted on the substrate.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation-in-part (CIP) of U.S. application Ser. No. 16/511,432, filed on Jul. 15, 2019, the entire contents of which are incorporated herein by reference.

BACKGROUND 1. Technical Field

The present disclosure is related to LiDAR detection systems and, in particular, to a LiDAR system with integrated unitary optical components for efficient control of optical alignment of the detection system.

2. Discussion of Related Art

A typical LiDAR detection system includes a source of optical radiation, for example, a laser, which emits light into a region. An optical detection device, which can include one or more optical detectors and/or an array of optical detectors, receives reflected light from the region and converts the reflected light to electrical signals. A processing device processes the electrical signals to identify and generate information associated with one or more target objects in the region. This information can include, for example, bearing, range, velocity, and/or reflectivity information for each target object.

One very important application for LiDAR detection systems is in automobiles, in which object detections can facilitate various features, such as parking assistance features, cross traffic warning features, blind spot detection features, autonomous vehicle operation, and many other features. In automotive LiDAR detection systems, it is important that the system be optically aligned to close tolerances to ensure high optical performance to eliminate missed target detections as well as false indications of detections. Alignment of the optical components in a LiDAR system can be a costly and time consuming task.

SUMMARY

According to one aspect, a LiDAR apparatus is provided. The LiDAR apparatus includes a first substrate and a unitary optical element mounted on the first substrate. The unitary optical element includes: (i) a fast axis collimator (FAC) lens receiving light from a laser diode source and generating therefrom an at least partially collimated light beam, (ii) a polarizing beam splitter optically coupled to the FAC lens, at least a portion of the at least partially collimated light beam passing through the polarizing beam splitter to a region being observed by the LiDAR apparatus, (iii) an aperture element optically coupled to the polarizing beam splitter, and (iv) an opaque coating formed on a back side of the aperture element, the opaque coating being patterned to provide a transparent aperture. At least a portion of light returning to the LiDAR apparatus from the region being observed is directed by the polarizing beam splitter, through the transparent aperture in the opaque coating on the aperture element, to an optical detector.

In some exemplary embodiments, the LiDAR apparatus further comprises a second substrate in fixed spatial relation to the first substrate; wherein, the optical detector is mounted on the second substrate. The first and second substrates can be held in stationary spatial relation with respect to each other by a supporting frame. The first and second substrates can be held in stationary spatial relation substantially perpendicular to each other by the supporting frame.

In some exemplary embodiments, the unitary optical element further comprises a quarter wave plate optically coupled to the polarizing beam splitter between the polarizing beam splitter and the region being observed.

In some exemplary embodiments, the unitary optical element is a one-piece precision glass optical element.

In some exemplary embodiments, the laser diode source is part of the unitary optical element.

In some exemplary embodiments, the LiDAR apparatus further comprises an optical band pass filter in an optical path of the LiDAR apparatus, the optical band pass filter being adapted to pass the portion of light returning to the LiDAR apparatus from the region being observed and block other light entering the band pass filter. The optical band pass filter can include one or more optical coatings formed on a component of the LiDAR apparatus. The component of the LiDAR apparatus on which the one or more optical coatings are formed can be at least one of the polarizing beam splitter, the aperture element, or the optical detector.

According to another aspect, a LiDAR apparatus is provided. The LiDAR apparatus includes a substrate and a laser diode on a surface of the substrate for outputting light. A fast axis collimator (FAC) lens on the surface of the substrate receives the light and generates therefrom an at least partially collimated light beam. A polarizing beam splitter optically coupled to the FAC lens receives the at least partially collimated light beam, at least a portion of the at least partially collimated light beam passing through the polarizing beam splitter to a region being observed by the LiDAR apparatus. An aperture element is optically coupled to the polarizing beam splitter. An opaque coating is formed on a back side of the aperture element, the opaque coating being patterned to provide a transparent aperture. An at least partially reflective optical element on the surface of the substrate receives light from the transparent aperture in the opaque coating on the aperture element and directs the received light from the transparent aperture in the opaque coating on the aperture element in a direction toward the surface of the substrate. An optical detector is optically coupled to the at least partially reflective optical element. At least a portion of light returning to the LiDAR apparatus from the region being observed is directed by the polarizing beam splitter, through the transparent aperture in the opaque coating on the aperture element, through the at least partially reflective optical element to the optical detector.

In some exemplary embodiments, the at least partially reflective optical element comprises a prism. In some exemplary embodiments, the prism is a 45-degree prism. Alternatively, the prism is a 50-degree prism. A reflective angle of the prism is determined at least in part by a direction between the prism and the optical detector. The reflective angle of the prism is controlled at least in part by selection of an index of refraction of the prism.

In some exemplary embodiments, the at least partially reflective optical element comprises a mirror. In some exemplary embodiments, the at least partially reflective optical element comprises a reflective coating formed on a surface of an optical element.

In some exemplary embodiments, the optical detector is on the surface of the substrate.

In some exemplary embodiments, the FAC lens, the polarizing beam splitter, and the aperture element are formed as a unitary optical element on the surface of the substrate. The unitary optical element can be a one-piece precision glass optical element.

In some exemplary embodiments, the at least partially reflective optical element is also formed as part of the unitary optical element.

In some exemplary embodiments, the laser diode is also formed as part of the unitary optical element.

In some exemplary embodiments, the LiDAR apparatus further comprises a quarter wave plate optically coupled to the polarizing beam splitter between the polarizing beam splitter and the region being observed. In some exemplary embodiments, the quarter wave plate, the FAC lens, the polarizing beam splitter, and the aperture element are formed as a unitary optical element on the surface of the substrate, and the unitary optical element is a one-piece precision glass optical element.

In some exemplary embodiments, the LiDAR apparatus further comprises an optical band pass filter in an optical path of the LiDAR apparatus, the optical band pass filter being adapted to pass the portion of light returning to the LiDAR apparatus from the region being observed and block other light entering the band pass filter.

In some exemplary embodiments, the optical band pass filter comprises one or more optical coatings formed on a component of the LiDAR apparatus. The component of the LiDAR apparatus on which the one or more optical coatings are formed is at least one of the polarizing beam splitter, the aperture element, the at least partially reflective optical element, and a cover over the optical detector.

BRIEF DESCRIPTION OF THE DRAWINGS

The present disclosure is further described in the detailed description which follows, in reference to the noted plurality of drawings by way of non-limiting examples of embodiments of the present disclosure, in which like reference numerals represent similar parts throughout the several views of the drawings.

FIG. 1 includes a schematic functional block diagram of a scanning LiDAR system, according to some exemplary embodiments.

FIGS. 2A and 2B include schematic functional diagrams illustrating portions of the scanning LiDAR system of FIG. 1 , according to some exemplary embodiments.

FIG. 3 includes a schematic functional block diagram of a scanning LiDAR system, in which horizontal and vertical scanning are performed, according to exemplary embodiments.

FIGS. 4A and 4B include schematic diagrams illustrating portions of a scanning LiDAR system in which a coaxial configuration is implemented, according to some exemplary embodiments.

FIGS. 5A and 5B include schematic diagrams illustrating portions of scanning LiDAR systems, in which a coaxial configuration is implemented, according to some exemplary embodiments.

FIGS. 6A and 6B include schematic cross-sectional diagrams which illustrate two configurations of coaxial scanning LiDAR systems, in which discrete lasers and discrete detectors are used, according to some exemplary embodiments.

FIG. 7 includes a schematic perspective view illustrating a portion of a scanning LiDAR system, according to some exemplary embodiments.

FIGS. 8A, 8B, 8C and 8D include four schematic diagrams of a unitary integrated optical element, according to some exemplary embodiments.

FIG. 9 includes a schematic perspective view of a LiDAR system with a plurality of systems illustrated in FIGS. 7 and 8 , according to some exemplary embodiments.

FIGS. 10A, 10B, 10C and 10D include schematic perspective views illustrating a portion of another scanning LiDAR system, according to four particular exemplary embodiments.

FIGS. 11A, 11B, 11C and 11D include schematic perspective views of a LiDAR system with a plurality of systems illustrated in FIGS. 10A, 10B, 10C and 10D, respectively, according to the four particular exemplary embodiments of FIGS. 10A, 10B, 10C and 10D, respectively.

FIGS. 12A, 12B, 12C and 12D are schematic perspective views illustrating four exemplary embodiments of an at least partially reflective optical element of the embodiments of FIGS. 10A, 10B, 10C, 10D, 11A, 11B, 11C and 11D.

FIG. 13 includes a schematic perspective view of an automobile equipped with one or more scanning LiDAR systems described herein in detail, according to some exemplary embodiments.

FIG. 14 includes a schematic top view of an automobile equipped with two scanning LiDAR systems, as described herein in detail, according to some exemplary embodiments.

DETAILED DESCRIPTION

FIG. 1 includes a schematic functional block diagram of a scanning LiDAR system 100, according to exemplary embodiments. Referring to FIG. 1 , system 100 includes a digital signal processor and controller (DSPC) 102, which performs all of the control and signal processing required to carry out the LiDAR target object detection functionality of system 100. An optical source 104, such as a laser, operates under control of DSPC 102 via one or more control signals 116 to generate the one or more optical signals transmitted into a region 106 being observed/analyzed. Optical source 104 can include a single laser, or optical source 104 can include multiple lasers, which can be arranged in a one-dimensional or two-dimensional array. One or more optical signals 108 from source 104 impinge on scanning mirror 110, which can be a microelectromechanical system (MEMS) scanning mirror. Scanning mirror 110 is rotatable about an axis 114 by an actuator 112, which operates under control of one or more control signals 117 provided by DSPC 102 to control the rotation angle of scanning mirror 110, such that the one or more output optical signals are scanned at various angles into region 106. The output optical signals pass through a lens or glass plate 122, which generates one or more at least partially collimated optical signals 123 which are scanned across region 106.

Returning optical signals 125 are received from region 106 at receive subsystem 118. Receive subsystem 118 includes a lens 120 which receives and focuses light 125 returning from region 106. According to some exemplary embodiments, mask 124 is located at the focal plane of lens 120, such that the returning light is focused at mask 124. Light passing through mask 124 impinges on optical detector or detector array 126, which can include a protective window or cover 127. Detector array 126 converts the received optical signals to electrical signals, and a processor 128 generates digital signals based on the electrical signals and transmits the digital signals 130 to DSPC 102 for processing to develop target object identification, tracking and/or other operations. Reports of detections to one or more user interfaces or memory or other functions can be carried out via I/O port 132.

FIGS. 2A and 2B include schematic functional diagrams illustrating portions of scanning LiDAR system 100 of FIG. 1 , according to exemplary embodiments. FIGS. 2A and 2B illustrate scanning of the transmitted optical signals into region 106 and reception of returning optical signals for a first angular direction of scanning of scanning mirror 110 about axis 114 and a second opposite angular scanning direction of scanning mirror 110 about axis 114, respectively.

Referring to FIGS. 1, 2A and 2B, in some exemplary embodiments, optical source 104 can include one or more linear arrays of lasers disposed along an axis. That is, each linear array of lasers can include a plurality of lasers disposed along a vertical axis, i.e., a y-axis. In the exemplary embodiment illustrated in FIGS. 2A and 2B, two linear arrays are disposed along parallel axes in the y-axis direction. The axes can be displaced along a horizontal axis, i.e., an x-axis. Also, the two linear laser arrays can be displaced also in the vertical direction (y-axis) in order to generate different elevation angles. Alternatively, the linear laser arrays could be rotated around the x-axis in order to generate different elevation angles. Thus, as illustrated in FIGS. 2A and 2B, the two parallel linear laser arrays create a two-dimensional array of laser outputs transmitted orthogonal to the x-y plane. In some particular exemplary embodiments, each of two linear arrays includes 8 lasers disposed along the y-axis, for a total of 16 lasers in the two-dimensional array. It will be understood that any number of lasers can be used, in accordance with the present embodiments. For example, in some particular exemplary embodiments, two linear arrays of 11 lasers, i.e., a total of 22 lasers, are used.

Continuing to refer to FIGS. 1, 2A and 2B, in some exemplary embodiments, the optical output signals from the laser array in source 104 are focused by a lens 111 onto MEMS scanning mirror 110. The optical signals are reflected from scanning mirror 110 through glass plate or lens 122, which generates the substantially mutually parallel at-least-partially collimated optical output signals 123. Controlled rotation of scanning mirror 110 via actuator 112 and DSPC 102 scans the at-least-partially collimated optical output signals 123 over region 106. Output signals or beams 123 constitute a fan of beams 123, where each beam is at-least-partially collimated. In some particular exemplary embodiments, the fan angle can be 15° to 22°. In some alternative embodiments, beams 123 are substantially mutually parallel. Light 125 returning from region 106, for example, light reflected from one or more target objects, is received at lens 120 of receive subsystem 118. Lens 120 focuses the returning light 125 onto mask 124, which is positioned in front of optical detector array 126. Thus, in the particular illustrated exemplary embodiments, detectors are arranged to provide a focal plane detector. Detector array 126 converts the received optical signals to electrical signals, and processor 128 generates digital signals based on the electrical signals and transmits the digital signals 130 to DSPC 102 for processing to develop target object identification, tracking and/or other operations. Reports of detections to one or more user interfaces or memory or other functions can be carried out via I/O port 132.

Thus, as illustrated in FIGS. 2A and 2B, in some particular exemplary embodiments, two arrays of 1×8 lasers are used to generate 16 individual laser beams, each beam with a nominal divergence of <0.1°. The vertical divergence of the group of 8 beams is nominally approximately 15°. Scanning mirror 110 is controlled to scan across a nominal range of approximately 60°, i.e., ±30° from its centered position. These angular limits are illustrated in FIGS. 2A and 2B in the diagrams of the x-y plane. FIG. 2A illustrates the case in which the output optical signals 123 are scanned in a first direction (to the right in FIG. 2A) via angular rotation of scanning mirror 110 in a first angular direction, and FIG. 2B illustrates the case in which the output signals 123 are scanned in a second direction (to the right in FIG. 2B) via angular rotation of scanning mirror 110 in a second angular direction. The resulting returning optical signals are scanned across the columns of the 32×8 detector array 126 illuminating pixels in the array in a predetermined order determined by the scanning of the output optical signals 123 into region 106, as illustrated in the schematic illustrations of pixel illumination scanning 137 and 139 in FIGS. 2A and 2B, respectively. It will be understood that all of these parameters are exemplary nominal values. According to the present disclosure, any number of lasers can be used, having a group beam divergence of greater than or less than 15°, and the angular scanning limits can be greater than or less than ±30° from the centered position of scanning mirror 110.

In some embodiments, in addition to horizontal scanning as described above in detail, scanning can also be carried out vertically. The vertical scanning can be performed in order to increase vertical resolution. FIG. 3 includes a schematic functional block diagram of a scanning LiDAR system 100A, in which horizontal and vertical scanning are performed, according to exemplary embodiments. In FIG. 3 , elements that are substantially the same as those in FIGS. 1, 2A and 2B are identified by the same reference numerals. Referring to FIG. 3 , in this embodiment, actuator 112A, in addition to initiating and controlling horizontal scanning of scanning mirror 110A about vertical axis 114, initiates and controls vertical scanning of scanning mirror 110A about horizontal axis 114A. In this alternative embodiment, mask 124 is also moved vertically alternately up and down in synchronization with the vertical scanning of scanning mirror 110A. Vertical movement of mask 124 is initiated by a mechanical actuation device, such as a piezoelectric actuator 202, in synchronization with scanning of scanning mirror 110A, such that alignment of mask 124 with returning light 125 is maintained. This synchronization is accomplished via interface 204 with DSPC 102.

FIGS. 4A and 4B include schematic diagrams illustrating portions of a scanning LiDAR system 200 in which a coaxial configuration is implemented, according to some exemplary embodiments. FIG. 4A illustrates a single coaxial configuration, and FIG. 4B illustrates multiple coaxial configurations in parallel. Referring to FIGS. 4A and 4B, a laser light source 304 integrated on or in a substrate 306 generates an output beam of light. The output beam is reflected by a polarizing beam splitting cube 302 such that output signals 323 are transmitted into region 106. Returning light signals 325 from region 106 are transmitted through beam splitting cube 302, through an opening 308 in substrate 306. The light may pass through an optional optical bandpass filter 305, which further reduces the ambient light. Optical bandpass filter 305 is placed in the optical path of LiDAR system 200 and is adapted to pass returning light signals 325 from the region 106 being observed and to block other light, such as ambient light which may interfere with or degrade operation of system 200. In some exemplary embodiments, bandpass filter 305 can be formed of one or more optical coatings 307 formed on a component of LiDAR system 200, such as, for example, a glass substrate 309. In some exemplary embodiments, bandpass filter 305 is characterized by a drift in its wavelength pass band which is dependent on temperature. Laser light source 304 can also have a temperature-dependent drift in wavelength of its output. In some exemplary embodiments, the temperature drift of laser light source 304 and that of bandpass filter 305 are matched, such that temperature effects on operation of the overall system are substantially reduced.

FIGS. 5A and 5B include schematic diagrams illustrating portions of scanning LiDAR systems 300A and 300B, respectively, in which a coaxial configuration is implemented, according to some exemplary embodiments. The primary difference between systems 300A, 300B of FIGS. 5A and 5B is that, in system 300A, mask 324 is under substrate 306, and, in system 300B, mask 324 is at the top side of substrate 306. In both systems 300A and 300B, incoming light from polarizing beam splitting cube 302 passes through slits, openings or apertures 342 in mask 324 and impinges on detector 326. In the embodiments of FIGS. 5A and 5B, lens 322 generates the substantially mutually parallel at-least-partially collimated optical output signals 323A. Controlled rotation of the scanning mirror scans the substantially mutually parallel at-least-partially collimated optical output signals 323A over the region being analyzed.

It should be noted that polarizing beam splitting cube 302 in the embodiments described above in detail in connection with FIGS. 4A, 4B, 5A and 5B need not be a cube. In alternative embodiments, polarizing beam splitting cube 302 can be replaced with a polarizing beam splitting plate tilted at an appropriate angle with respect to the optical paths of the respective systems.

FIGS. 6A and 6B include schematic cross-sectional diagrams which illustrate two configurations of coaxial scanning LiDAR systems 600 and 700, respectively, in which discrete lasers and discrete detectors are used, according to some exemplary embodiments. Referring to FIG. 6A, a laser light source 604 is integrated on or over a substrate 606, with a layer of inert spacing material 605, made of, for example, printed circuit board (PCB) material, epoxy, metal or similar material, mounted therebetween. Laser light source 604 generates an output beam of light 607, which impinges on a beam splitting cube 602, such that output signals 623 are transmitted into region 106. Returning light signals from region 106 are transmitted through beam splitting cube 602, through a slit 642 in mask 624 and then through opening 608 in substrate 606. It should be noted that beam splitting cube 602 can be a polarizing beam splitting cube. It should also be noted that, as with the embodiments described above, beam splitting cube 602, or polarizing beam splitting cube 602, need not be a cube. It may be a beam splitting plate or polarizing beam splitting plate tilted at an appropriate angle with respect to the optical path(s). Light beams 625 from slit 642 pass through opening 608 in substrate 606 and are detected by detector 626, which is mounted to the bottom side of substrate 606. In some exemplary embodiments, detector 626 is a surface mount device mounted to the bottom surface of substrate 606. It should be noted that, in some exemplary embodiments, laser light source 604 is one of an array of laser light sources disposed in parallel along an axis directed substantially normal to the page of FIG. 6A. Similarly, polarizing or non-polarizing beam splitting cube or plate 602 can be a single long cube or plate, or multiple cubes or plates, extending along the same axis normal to the page. Similarly, detector 626 can be a single long detector or array of detectors, or multiple detectors or arrays of detectors, extending along the same axis normal to the page.

Referring to FIG. 6B, a laser light source 704 is integrated on or over a substrate 706, with a layer of inert spacing material 705, made of, for example, printed circuit board (PCB) material, epoxy, or other similar material, mounted therebetween. Laser light source 704 generates an output beam of light 707, which impinges on a beam splitting cube 702, such that output signals 723 are transmitted into region 106. Returning light signals from region 106 are transmitted through beam splitting cube 702, through a slit 742 in mask 724. It should be noted that beam splitting cube 702 can be a polarizing beam splitting cube. It should also be noted that, as with the embodiments described above, beam splitting cube 702, or polarizing beam splitting cube 702, need not be a cube. It may be a beam splitting plate or polarizing beam splitting plate tilted at an appropriate angle with respect to the optical path(s). Light beams 725 from slit 742 are detected by detector 726, which is mounted to the top side or surface of second substrate 728. First substrate 706 and second substrate 728 are mechanically supported and properly located with respect to each other by a mounting/spacing support layer 709. Mounting/spacing support layer 709 can be made of, for example, a layer of inert spacing material, made of, for example, printed circuit board (PCB) material, epoxy, metal, or other similar material. The physical configuration of mounting/spacing support layer 709, i.e., dimensions, location, etc., are selected to provide appropriate support and stability among components such as laser light source 704, beam splitting cube 702, first substrate 706, second substrate 728, mask 724 and slit 742, such that the performance requirements of system 700 are met.

It should be noted that, in some exemplary embodiments, laser light source 704 is one of an array of laser light sources disposed in parallel along an axis directed substantially normal to the page of FIG. 6B. Similarly, polarizing or non-polarizing beam splitting cube or plate 702 can be a single long cube or plate, or multiple cubes or plates, extending along the same axis normal to the page. Similarly, detector 726 can be a single long detector or array of detectors, or multiple detectors or arrays of detectors, extending along the same axis normal to the page.

FIG. 7 includes a schematic perspective view illustrating a portion of a scanning LiDAR system 800, according to some exemplary embodiments. Referring to FIG. 7 , system 800 includes laser diode source 804 for emitting illuminating light. A fast axis collimating (FAC) lens 808 receives the light from laser diode source 804, at least partially collimates the light and passes it to polarizing beam splitting cube 806. It should be noted that FAC lens 808 does not necessarily fully collimate the light from laser diode source 804. Rather, in some embodiments, the light is compressed to achieve a lower divergence. That is, while the light may be fully collimated by FAC lens 808, in general, full collimation is not required. Illuminating light which passes through polarizing beam splitting cube 806 may pass through an optional quarter wave plate 810 which converts linearly polarized light into circularly polarized light The illuminating light passing through polarizing beam splitting cube 806 and/or quarter wave plate 810 is scanned into region 106 being observed. Light returning from region 106 is reflected by polarizing beam splitting cube 806 through slit aperture mask 812. In some exemplary embodiments, slit aperture mask 812 includes a glass substrate with an opaque coating 814 deposited on the glass. Opaque coating 814 is patterned to provide a slit opening or aperture through with returning light passes. This light is received by a photo detector or photo detector array 822. Photo detector or photo detector array 822 can be protected by a protective window or cover 825, which is optically transparent and which protects photo detector or photo detector array 822 from the environment. System 800 can also include an optical bandpass filter 823, which is placed in the optical path of system 800 and is adapted to pass returning light signals from the region 106 being observed and to block other light, such as ambient light which may interfere with or degrade operation of system 800. In some exemplary embodiments, bandpass filter 823 can be formed of one or more optical coatings formed on a component of LiDAR system 800. For example, in the particular exemplary embodiment illustrated in FIG. 7 , the one or more coatings of bandpass filter 823 are formed on protective window or cover 825 of photo detector or photo detector array 822. Alternatively, as also illustrated in FIG. 7 , the one or more optical coatings of bandpass filter 823 can be formed on the surface of slit aperture mask element 812, preferably under opaque mask layer 814. It is noted that, for ease of illustration and conciseness of the disclosure, FIG. 7 illustrates bandpass filter 823 on both protective window or cover 825 and slit aperture mask element 812; however, since only a single bandpass filter 823 would typically be used, bandpass filter 823 would not necessarily be disposed in both locations, but, rather, in one of the locations, depending on the particular application.

As illustrated in FIG. 7 , optical components including laser diode 804, FAC lens 808, polarizing beam splitting cube 806, quarter wave plate 810, and slit aperture mask 812 are mounted or formed on a first substrate or printed circuit board (PCB) 820. Detector 822 is mounted or formed on a second substrate or PCB 818. First and second PCBs 820 and 818 are spatially supported and fixedly attached to each other and held stationary with respect to each other by a supporting frame element 816. In some exemplary embodiments, PCBs 820, 818 are held substantially perpendicular.

In conventional LiDAR systems, active alignment of optical components is required. This active alignment can be inefficient and time consuming, and, therefore, costly. In contrast, according to the present disclosure, optical components such laser source 804, FAC lens 808, polarizing beam splitting cube 806, quarter wave plate 810 and slit aperture mask 812 can be integrated in a single unitary optical element, which can be manufactured to very close tolerances, such that spatial relationships among the optical elements are precisely, accurately and permanently controlled, thus eliminating the need for active alignment.

FIGS. 8A, 8B, 8C and 8D include four schematic views of a unitary (one-piece) integrated optical element 850, according to some exemplary embodiments. Referring to FIGS. 8A, 8B, 8C and 8D, unitary integrated optical element 850 includes one-piece precision glass optics, which includes laser diode source 804, FAC lens 808, polarizing beam splitting cube 806, slit aperture mask 812 with opaque mask 814 and bandpass filter 823 formed thereon, and quarter wave plate 810 in a single precision optical element. It is noted that, in some exemplary embodiments, such as the embodiment illustrated in FIG. FIGS. 8A, 8B, 8C and 8D, the one or more optical coatings of bandpass filter 823 can be formed on the surface of slit aperture mask element 812, preferably under opaque mask layer 814. It is noted that laser diode source need not be integrated in unitary integrated optical element 850. In alternative embodiments, laser diode source is a separate element, which can be formed on PCB 820, or formed on a separate laser PCB, which is mounted on PCB 820. All of the elements are made to very tight tolerances to provide the desired device alignment. In particular, slit, opening or aperture 817 formed in mask 814 in slit aperture mask 812 is positioned precisely with respect to FAC lens 808 and polarizing beam splitting cube 806 portions of the single unitary optical element 850.

It should be noted that, in some embodiments, mask 814 including the patterned opaque coating providing slit, opening or aperture 817 need not be a separate element 812. Instead, coating 814 and slit, opening or aperture 817 can be formed directly on the surface of polarizing beam splitting cube 806. In this alternative embodiment, referring to FIGS. 7, 8A, 8B, 8C and 8D, slit aperture mask element 812 would be omitted, and coating 814 with slit, opening or aperture 817 would be formed directly on the surface of polarizing beam splitting cube 806.

FIG. 9 includes a schematic perspective view of a LiDAR system 890 with a plurality of systems 800 illustrated in FIGS. 7 and 8 , according to some exemplary embodiments. Referring to FIG. 9 , each system 800 includes the unitary one-piece integrated optic element 850A, 850B, 850C mounted on first substrate or PCB 820A, 820B, 820C. As described above, each integrated optic element 850A, 850B, 850C includes a laser diode source 804A, 804B, 804C; a FAC lens 808A, 808B, 808C; a polarizing beam splitting cube 806A, 806B, 806C; a slit aperture mask 812A, 812B, 812C with a respective patterned mask 814A, 814B, 814C and respective bandpass filter 823A, 823B, 823C; and an optional quarter wave plate 810A, 810B, 810C. First substrates or PCBs 820A, 820B, 820C and second substrate or PCB 818 are spatially supported and fixedly attached to each other and held stationary with respect to each other by a respective supporting frame element 816A, 816B, 816C. In some exemplary embodiments, PCBs 820A, 820B, 820C are held substantially perpendicular to second substrate or PCB 818.

FIGS. 10A, 10B, 10C and 10D include schematic perspective views illustrating a portion of another scanning LiDAR system 900, according to four particular exemplary embodiments. FIGS. 11A, 11B, 11C and 11D include schematic perspective views of a LiDAR system 990 with a plurality of systems 900 illustrated in FIGS. 10A, 10B, 10C and 10D, respectively, according to the four particular exemplary embodiments of FIGS. 10A, 10B, 10C and 10D, respectively. System 900 of FIGS. 10A-D, 11A-Dare different from system 800 of FIG. 7 in that, in system 900 of FIG. FIGS. 10A-D, 11A-D, a single substrate or PCB 920 is used instead of a pair of substrates 818, 820 held perpendicular to each other. This is accomplished in system 900 by the addition of an at least partially reflective element 927 added at the optical slit or aperture of slit aperture mask 912. In some exemplary embodiments, at least partially reflective element 927 can be a prism. Alternatively, element 927 can be a substrate such as glass coated with a reflective coating. Light passing through slit aperture mask 912 is directed down to the surface of substrate or PCB 920, on which optical detector or array of detectors 922 is mounted, by at least partially reflective element 927.

Referring to FIGS. 10A-D, 11A-D system 900 includes laser diode source 904 mounted on or in laser PCB 905, which is mounted on substrate or PCB 920. A fast axis collimating (FAC) lens 908 receives the light from laser diode source 904, at least partially collimates the light and passes it to polarizing beam splitting cube 906. It should be noted that FAC lens 908 does not necessarily fully collimate the light from laser diode source 904. Rather, in some embodiments, the light is compressed to achieve a lower divergence. That is, while the light may be fully collimated by FAC lens 908, in general, full collimation is not required. Illuminating light which passes through polarizing beam splitting cube 806 may pass through an optional quarter wave plate 910 which converts linearly polarized light into circularly polarized light The illuminating light passing through polarizing beam splitting cube 906 and/or quarter wave plate 910 is scanned into region 106 being observed. Light returning from region 106 is directed by polarizing beam splitting cube 906 through slit aperture mask 912. In some exemplary embodiments, slit aperture mask 912 includes a glass substrate with an opaque coating 914 deposited on the glass. Opaque coating 914 is patterned to provide a slit opening or aperture 917 through which returning light passes. The light passing through slit opening or aperture 917 is reflected by at least partially reflective element 927 toward substrate or PCB 920. This light is received by photo detector or photo detector array 922, which is mounted on substrate or PCB 920.

As with the embodiments of FIGS. 7-9 , the optical elements of system 900 can be integrated in a single unitary optical element 950, which can be manufactured to very close tolerances, such that spatial relationships among the optical elements are precisely, accurately and permanently controlled, thus eliminating the need for active alignment. Specifically, optical components such as laser diode source 904, FAC lens 908, polarizing beam splitting cube 906, quarter wave plate 910, slit aperture mask 912, and at least partially reflective element 927 can be integrated in a single unitary optical element 950. In some exemplary embodiments, unitary integrated optical element 950 includes one-piece precision glass optics, which includes laser diode source 904, FAC lens 908, polarizing beam splitting cube 906, quarter wave plate 910, slit aperture mask 912, and at least partially reflective element 927 in a single precision optical element. All of the elements are made to very tight tolerances to provide the desired device alignment. In particular, slit, opening or aperture 917 formed in mask 914 in slit aperture mask 912 is positioned precisely with respect to FAC lens 908 and polarizing beam splitting cube 906 portions of the single unitary optical element 950.

As with the embodiments of FIGS. 7-9 , laser diode source 904 need not be integrated in unitary integrated optical element 950. In alternative embodiments, laser diode source 904 is a separate element, which can be formed on PCB 920, or formed on laser PCB 905, which is mounted on PCB 920. Also, as with the embodiments of FIGS. 7-9 , in some embodiments, mask 914 including the patterned opaque coating providing slit, opening or aperture 917 need not be a separate element 912. Instead, coating 914 and slit, opening or aperture 917 can be formed directly on the surface of polarizing beam splitting cube 906. In this alternative embodiment, slit aperture mask element 912 would be omitted, and coating 914 with slit, opening or aperture 917 would be formed directly on the surface of polarizing beam splitting cube 906.

Photo detector or photo detector array 922 can be protected by a protective window or cover 925, which is optically transparent and which protects photo detector or photo detector array 922 from the environment. System 900 can also include an optical bandpass filter 923, which is placed in the optical path of system 900 and is adapted to pass returning light signals from the region 106 being observed and to block other light, such as ambient light which may interfere with or degrade operation of system 900. In some exemplary embodiments, bandpass filter 923 can be formed of one or more optical coatings formed on a component of LiDAR system 900.

As noted above, FIGS. 11A-11D include schematic perspective views of a LiDAR system 990 with a plurality of systems 900 illustrated in FIGS. 10A-10D, respectively, according to some exemplary embodiments. Referring to FIGS. 11A-11D, each system 900 includes the unitary one-piece integrated optic element 950A, 950B, 950C mounted on substrate or PCB 920. As described above, each integrated optic element 950A, 950B, 950C includes a laser diode source 904A, 904B, 904C on a respective laser PCB 905A, 059B, 905C; a FAC lens 908A, 908B, 908C; a polarizing beam splitting cube 906A, 906B, 906C; a slit aperture mask 912A, 912B, 912C with a respective patterned mask 914A, 914B, 914C with openings or apertures 917A, 917B, 917C; an optional quarter wave plate 910A, 910B, 910C; and at least partially reflective elements 927A, 927B, 927C.

FIGS. 10A-10B, 11A-11D illustrate four particular exemplary embodiments of system 900. The embodiments of systems 900 in FIGS. 10A-10B, 11A-11D are the same with the exception of the placement or location of bandpass filter 923. In the embodiment of FIGS. 10A and 11A, bandpass filter 923 is placed on the surface of polarizing beam splitting cube 906. In the embodiment of FIGS. 10B and 11B, bandpass filter 923 is placed on the surface of slit aperture mask 912, beneath patterned opaque mask 914. In the embodiment of FIGS. 10C and 11C, bandpass filter 923 is placed on the surface of at least partially reflective element 927 closest to optical detector or detector array 922. In the embodiment of FIGS. 10D and 11D, bandpass filter 923 is placed on the surface of protective window or cover 925.

It is noted that, throughout the foregoing detailed description and illustrations of exemplary embodiments, FAC lenses 808, 908 are configured as having rectangular solid shape. It will be understood that this shape is selected for purposes of exemplary illustration only. FAC lenses 808, 908 can have any shape used for FAC lenses. For example, FAC lenses 808, 908 can have circular cylindrical shape.

In some embodiments, at least partially reflective element 927 can be a prism. In other exemplary embodiments, element 927 can be a mirror. Specifically, in the case of a mirror, element 927 can be a substrate made of, for example, glass, with a reflective, i.e., mirror, coating formed on its angled surface. Alternatively, a plate mirror can be used instead of a mirror-coated glass substrate. FIGS. 12A, 12B, 12C and 12D are schematic perspective views illustrating these various embodiments of at least partially reflective element 927. In the embodiment of FIG. 12A, at least partially reflective element 927 includes an optically transparent substrate 919 coated with a reflective coating 921 along an angled surface of substrate 919. In the embodiment of FIG. 12B, at least partially reflective element 927 is rotated 180 degrees with respect to the embodiment of FIG. 12A. In FIG. 12B, at least partially reflective element 927 includes an optically transparent substrate 929 coated with a reflective coating 931 along an angled surface of substrate 919. In the embodiment of FIG. 12C, at least partially reflective element 927 includes a plate mirror having a substrate 933 and a reflective front surface 935. In the embodiment of FIG. 12D, at least partially reflective element 927 includes a prism which includes a body 937 having an angled surface 939.

At least partially reflective element 927 is characterized by an angle of the reflective surface, or “reflective angle” or “prism angle” between the optical path entering element 927 and the optical path exiting element 927. That reflective angle is determined by the location of detector or detector array 922. In some exemplary embodiments, element 927 is referred to as a “right angle prism” in that the angle of the reflecting surface with respect to the entering optical path is nominally 45 degrees, resulting in redirecting the light 90 degrees toward detector or detector array 922. In other embodiments, the reflective angle of element 927 is 40 degrees, resulting in a redirection angle toward detector or detector array 922 of 80 degrees. In still other embodiments, the reflective angle of element 927 is 50 degrees, resulting in a redirection angle toward detector or detector array 922 of 100 degrees. In the embodiments of FIGS. 12A-12C, these angles are set by the shape of substrates 919, 929, 933 and their angled surfaces, and nearly 100 percent reflection from reflecting surfaces 921, 931, 935, respectively. In the case of the embodiment of FIG. 12D, the desired reflection is obtained by a combination of selection of the slope of the angled prism surface and selection of the index of refraction of substrate 937, such that total internal reflection is achieved.

FIG. 13 includes a schematic perspective view of an automobile 500, equipped with one or more scanning LiDAR systems 800, 900, described herein in detail, according to exemplary embodiments. Referring to FIG. 13 , it should be noted that, although only a single scanning LiDAR system 800, 900 is illustrated, it will be understood that multiple LiDAR systems 800, 900 according to the exemplary embodiments can be used in automobile 500. Also, for simplicity of illustration, scanning LiDAR system 800, 900 is illustrated as being mounted on or in the front section of automobile 500. It will also be understood that one or more scanning LiDAR systems 800, 900 can be mounted at various locations on automobile 500. Also, it will be understood that LiDAR system 800, 900 can be replaced with any of the LiDAR systems described herein. That is, the description of FIG. 13 is applicable to an automobile equipped with any of the embodiments described herein.

FIG. 14 includes a schematic top view of automobile 500 equipped with two scanning LiDAR systems 800, 900, as described above in detail, according to exemplary embodiments. In the particular embodiments illustrated in FIG. 14 , a first LiDAR system 800, 900 is connected via a bus 560, which in some embodiments can be a standard automotive controller area network (CAN) bus, to a first CAN bus electronic control unit (ECU) 558A. Detections generated by the LiDAR processing described herein in detail in LiDAR system 100, 100A can be reported to ECU 558A, which processes the detections and can provide detection alerts via CAN bus 560. Similarly, in some exemplary embodiments, a second LiDAR scanning system 800, 900 is connected via CAN bus 560 to a second CAN bus electronic control unit (ECU) 558B. Detections generated by the LiDAR processing described herein in detail in LiDAR system 800, 900 can be reported to ECU 558B, which processes the detections and can provide detection alerts via CAN bus 560. It should be noted that this configuration is exemplary only, and that many other automobile LiDAR configurations within automobile 500 can be implemented. For example, a single ECU can be used instead of multiple ECUs. Also, the separate ECUs can be omitted altogether. Also, it will be understood that LiDAR system 800, 900 can be replaced with any of the LiDAR systems described herein. That is, the description of FIG. 14 is applicable to an automobile equipped with any of the embodiments described herein.

It is noted that the present disclosure describes one or more scanning LiDAR systems installed in an automobile. It will be understood that the embodiments of scanning LiDAR systems of the disclosure are applicable to any kind of vehicle, e.g., bus, train, etc. Also, the scanning LiDAR systems of the present disclosure need not be associated with any kind of vehicle.

Whereas many alterations and modifications of the disclosure will become apparent to a person of ordinary skill in the art after having read the foregoing description, it is to be understood that the particular embodiments shown and described by way of illustration are in no way intended to be considered limiting. Further, the subject matter has been described with reference to particular embodiments, but variations within the spirit and scope of the disclosure will occur to those skilled in the art. It is noted that the foregoing examples have been provided merely for the purpose of explanation and are in no way to be construed as limiting of the present disclosure.

While the present inventive concept has been particularly shown and described with reference to exemplary embodiments thereof, it will be understood by those of ordinary skill in the art that various changes in form and details may be made therein without departing from the spirit and scope of the present inventive concept as defined by the following claims. 

The invention claimed is:
 1. A LiDAR apparatus, comprising: a first substrate; a unitary optical element mounted on the first substrate, the unitary optical element comprising: a fast axis collimator (FAC) lens receiving light from a laser diode source and generating therefrom an at least partially collimated light beam, a polarizing beam splitter optically coupled to the FAC lens, at least a portion of the at least partially collimated light beam passing through the polarizing beam splitter to a region being observed by the LiDAR apparatus, an aperture element optically coupled to the polarizing beam splitter, and an opaque coating formed on a back side of the aperture element, the opaque coating being patterned to provide a transparent aperture; wherein at least a portion of light returning to the LiDAR apparatus from the region being observed is directed by the polarizing beam splitter, through the transparent aperture in the opaque coating on the aperture element, to an optical detector.
 2. The LiDAR apparatus of claim 1, further comprising a second substrate in fixed spatial relation to the first substrate; wherein, the optical detector is mounted on the second substrate.
 3. The LiDAR apparatus of claim 2, wherein the first and second substrates are held in stationary spatial relation with respect to each other by a supporting frame.
 4. The LiDAR apparatus of claim 2, wherein the first and second substrates are held in stationary spatial relation substantially perpendicular to each other by a supporting frame.
 5. The LiDAR apparatus of claim 1, wherein the unitary optical element further comprises a quarter wave plate optically coupled to the polarizing beam splitter between the polarizing beam splitter and the region being observed.
 6. The LiDAR apparatus of claim 1, wherein the unitary optical element is a one-piece precision glass optical element.
 7. The LiDAR apparatus of claim 1, wherein the laser diode source is part of the unitary optical element.
 8. The LiDAR apparatus of claim 1, further comprising an optical band pass filter in an optical path of the LiDAR apparatus, the optical band pass filter being adapted to pass the portion of light returning to the LiDAR apparatus from the region being observed and block other light entering the band pass filter.
 9. The LiDAR apparatus of claim 8, wherein the optical band pass filter comprises one or more optical coatings formed on a component of the LiDAR apparatus.
 10. The LiDAR apparatus of claim 9, wherein the component of the LiDAR apparatus on which the one or more optical coatings are formed is the polarizing beam splitter.
 11. The LiDAR apparatus of claim 9, wherein the component of the LiDAR apparatus on which the one or more optical coatings are formed is the aperture element.
 12. The LiDAR apparatus of claim 9, wherein the component of the LiDAR apparatus on which the one or more optical coatings are formed is a cover over the optical detector.
 13. A LiDAR apparatus, comprising: a substrate; a laser diode on a surface of the substrate for outputting light; a fast axis collimator (FAC) lens on the surface of the substrate for receiving the light and generating therefrom an at least partially collimated light beam; a polarizing beam splitter optically coupled to the FAC lens for receiving the at least partially collimated light beam, at least a portion of the at least partially collimated light beam passing through the polarizing beam splitter to a region being observed by the LiDAR apparatus; an aperture element optically coupled to the polarizing beam splitter; an opaque coating formed on a back side of the aperture element, the opaque coating being patterned to provide a transparent aperture; an at least partially reflective optical element on the surface of the substrate for receiving light from the transparent aperture in the opaque coating on the aperture element and directing the received light from the transparent aperture in the opaque coating on the aperture element in a direction toward the surface of the substrate; and an optical detector optically coupled to the at least partially reflective optical element; wherein at least a portion of light returning to the LiDAR apparatus from the region being observed is directed by the polarizing beam splitter, through the transparent aperture in the opaque coating on the aperture element, through the at least partially reflective optical element to the optical detector.
 14. The LiDAR apparatus of claim 13, wherein the at least partially reflective optical element comprises a prism.
 15. The LiDAR apparatus of claim 14, wherein the prism is a 45-degree prism.
 16. The LiDAR apparatus of claim 14, wherein the prism is a 50-degree prism.
 17. The LiDAR apparatus of claim 14, wherein a reflective angle of the prism is determined at least in part by a direction between the prism and the optical detector.
 18. The LiDAR apparatus of claim 14, wherein a reflective angle of the prism is controlled at least in part by selection of an index of refraction of the prism.
 19. The LiDAR apparatus of claim 13, wherein the at least partially reflective optical element comprises a mirror.
 20. The LiDAR apparatus of claim 13, wherein the at least partially reflective optical element comprises a reflective coating formed on a surface of an optical element.
 21. The LiDAR apparatus of claim 13, wherein the optical detector is on the surface of the substrate.
 22. The LiDAR apparatus of claim 13, wherein the FAC lens, the polarizing beam splitter, and the aperture element are formed as a unitary optical element on the surface of the substrate.
 23. The LiDAR apparatus of claim 22, wherein the unitary optical element is a one-piece precision glass optical element.
 24. The LiDAR apparatus of claim 22, wherein the at least partially reflective optical element is also formed as part of the unitary optical element.
 25. The LiDAR apparatus of claim 22, wherein the laser diode is also formed as part of the unitary optical element.
 26. The LiDAR apparatus of claim 13, further comprising a quarter wave plate optically coupled to the polarizing beam splitter between the polarizing beam splitter and the region being observed.
 27. The LiDAR apparatus of claim 13, wherein: the quarter wave plate, the FAC lens, the polarizing beam splitter, and the aperture element are formed as a unitary optical element on the surface of the substrate; and the unitary optical element is a one-piece precision glass optical element.
 28. The LiDAR apparatus of claim 13, further comprising an optical band pass filter in an optical path of the LiDAR apparatus, the optical band pass filter being adapted to pass the portion of light returning to the LiDAR apparatus from the region being observed and block other light entering the band pass filter.
 29. The LiDAR apparatus of claim 28, wherein the optical band pass filter comprises one or more optical coatings formed on a component of the LiDAR apparatus.
 30. The LiDAR apparatus of claim 29, wherein the component of the LiDAR apparatus on which the one or more optical coatings are formed is the polarizing beam splitter.
 31. The LiDAR apparatus of claim 29, wherein the component of the LiDAR apparatus on which the one or more optical coatings are formed is the aperture element.
 32. The LiDAR apparatus of claim 29, wherein the component of the LiDAR apparatus on which the one or more optical coatings are formed is the at least partially reflective optical element.
 33. The LiDAR apparatus of claim 29, wherein the component of the LiDAR apparatus on which the one or more optical coatings are formed is a cover over the optical detector. 